filename:TLM__MD_M025_S093_TARGET_EXPOSE_SCAN___COUNT_2500003.DAT
scan_file:SCAN_MD_M025_S093_2016-02-01T200816Z_TGT10
sw_ver:664
start_time:"2016-02-01 20:08:16.758579"
end_time:"2016-02-02 02:18:45.765712"
duration:"6:10:29.007133"
channel:ZS
tip_num:9
lin_pos:-0.469062333104448
tip_offset:-49.109082932783998
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:4.0
z_ret:15732
z_ret_nm:2580.0480000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.6897077897306776
set_pt:6.951705195696956
fadj:7.3862821393148703
ctrl_image:False
mag_phase:False
work_pt:7.820670712536891
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-94.142905652783995
y_orig_um:229.08000832870206