filename:TLM__MD_M025_S094_TARGET_EXPOSE_SCAN___COUNT_2500004.DAT
scan_file:SCAN_MD_M025_S094_2016-02-04T221627Z_TGT02
sw_ver:664
start_time:"2016-02-04 22:16:27.844217"
end_time:"2016-02-05 15:16:21.863852"
duration:"16:59:54.019635"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:32
target:2
target_type:CAL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4.0
z_ret:2860
z_ret_nm:469.04000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0954451819638358
set_pt:1.773708705271992
fadj:2.9089799343862057
ctrl_image:False
mag_phase:False
work_pt:3.192977399272076
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-30.331599803023
y_orig_um:19.911112704000001