filename:TLM__MD_M026_S095_TARGET_EXPOSE_SCAN___COUNT_2600001.DAT
scan_file:SCAN_MD_M026_S095_2016-02-10T134400Z_TGT03
sw_ver:665
start_time:"2016-02-10 13:44:00.004510"
end_time:"2016-02-11 09:31:17.027284"
duration:"19:47:17.022774"
channel:ZS
tip_num:11
lin_pos:-2.2030975814450295
tip_offset:4.8292324711980372
wheel_pos:48
target:3
target_type:CAL
x_orig:50132
y_orig:42624
xsteps:512
x_step:2
x_step_nm:7.6276799999999998
xlen_um:3.9053721599999998
ysteps:512
y_step:6
y_step_nm:8.3333340000000007
ylen_um:4.2666670080000006
z_step:4
z_ret:203
z_ret_nm:33.292000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.6225680933852136
set_pt:2.1557946135652704
fadj:3.5352101930266269
ctrl_image:False
mag_phase:False
work_pt:3.880188535012182
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:26.308779351198034
y_orig_um:-13.688889984000001