filename:TLM__MD_M026_S095_TARGET_EXPOSE_SCAN___COUNT_2600001.DAT
scan_file:SCAN_MD_M026_S095_2016-02-11T124418Z_TGT10
sw_ver:665
start_time:"2016-02-11 12:44:18.030986"
end_time:"2016-02-11 17:42:15.036702"
duration:"4:57:57.005716"
channel:ZS
tip_num:9
lin_pos:-0.39551384756237123
tip_offset:79.600766765850338
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:4
z_ret:15732
z_ret_nm:2580.0480000000002
x_dir:H_L
y_dir:H_L
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:3.142748149843595
set_pt:2.5140764476997024
fadj:2.6712443732356754
ctrl_image:False
mag_phase:False
work_pt:2.828449357227819
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:34.566944045850342
y_orig_um:-139.08000112870204