filename:TLM__MD_M026_S095_TARGET_EXPOSE_SCAN___COUNT_2600001.DAT
scan_file:SCAN_MD_M026_S095_2016-02-12T030504Z_TGT06
sw_ver:665
start_time:"2016-02-12 03:05:04.047497"
end_time:"2016-02-12 19:29:07.066373"
duration:"16:24:03.018876"
channel:ZS
tip_num:10
lin_pos:-1.3586633096818495
tip_offset:-49.160791943236418
wheel_pos:96
target:6
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:3146
z_ret_nm:515.94400000000007
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.913862821393149
set_pt:1.7285420004577707
fadj:2.8345159075303274
ctrl_image:False
mag_phase:False
work_pt:3.1112646443229632
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-89.19085658323641
y_orig_um:40.000003200000002