filename:TLM__MD_M026_S095_TARGET_EXPOSE_SCAN___COUNT_2600001.DAT
scan_file:SCAN_MD_M026_S095_2016-02-14T050426Z_TGT10
sw_ver:665
start_time:"2016-02-14 05:04:26.105030"
end_time:"2016-02-14 22:01:24.124537"
duration:"16:56:58.019507"
channel:ZS
tip_num:9
lin_pos:-0.5056839856565194
tip_offset:-113.19697489890893
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:44500
y_orig:32768
xsteps:320
x_step:33
x_step_nm:125.85672
xlen_um:40.274150399999996
ysteps:320
y_step:90
y_step_nm:125.00001
ylen_um:40.000003200000002
z_step:4
z_ret:2110
z_ret_nm:346.04000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.7613488975356679
set_pt:6.2088960097657742
fadj:6.5967803463797967
ctrl_image:False
mag_phase:False
work_pt:6.985154792485714
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-113.19697489890893
y_orig_um:-184.08000472870205