filename:TLM__MD_M026_S095_TARGET_EXPOSE_SCAN___COUNT_2600001.DAT scan_file:SCAN_MD_M026_S095_2016-02-15T031133Z_TGT10 sw_ver:665 start_time:"2016-02-15 03:11:33.130486" end_time:"2016-02-15 19:35:56.149369" duration:"16:24:23.018883" channel:ZS tip_num:9 lin_pos:-0.51697566186007482 tip_offset:-132.95740825513093 wheel_pos:159 target:10 target_type:SOLGEL x_orig:32692 y_orig:32768 xsteps:320 x_step:33 x_step_nm:125.85672 xlen_um:40.274150399999996 ysteps:320 y_step:90 y_step_nm:125.00001 ylen_um:40.000003200000002 z_step:4 z_ret:2110 z_ret_nm:346.04000000000002 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.4241245136186773 set_pt:5.9391165026321815 fadj:6.310521095597772 ctrl_image:False mag_phase:False work_pt:6.6816554198175515 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-177.99123097513092 y_orig_um:-184.08000472870205