filename:TLM__MD_M026_S095_TARGET_EXPOSE_SCAN___COUNT_2600001.DAT
scan_file:SCAN_MD_M026_S095_2016-02-16T025758Z_TGT06
sw_ver:665
start_time:"2016-02-16 02:57:58.157847"
end_time:"2016-02-16 22:13:08.180005"
duration:"19:15:10.022158"
channel:ZS
tip_num:10
lin_pos:-1.3583581292439155
tip_offset:-48.626726176852053
wheel_pos:96
target:6
target_type:SILICON
x_orig:40660
y_orig:22016
xsteps:384
x_step:20
x_step_nm:76.276799999999994
xlen_um:29.290291199999999
ysteps:384
y_step:56
y_step_nm:77.777783999999997
ylen_um:29.866669055999999
z_step:4
z_ret:949
z_ret_nm:155.636
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.4648661020828566
set_pt:1.3662928206301976
fadj:2.2406347753109026
ctrl_image:False
mag_phase:False
work_pt:2.459210593065164
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-63.271871776852052
y_orig_um:14.933334528000001