filename:TLM__MD_M026_S096_TARGET_EXPOSE_SCAN___COUNT_2600002.DAT
scan_file:SCAN_MD_M026_S096_2016-02-18T070741Z_TGT10
sw_ver:665
start_time:"2016-02-18 07:07:41.217880"
end_time:"2016-02-18 13:53:56.225673"
duration:"6:46:15.007793"
channel:ZS
tip_num:9
lin_pos:-0.39520866712443731
tip_offset:80.134832532234711
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:4
z_ret:11475
z_ret_nm:1881.9000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.7936980239566642
set_pt:6.234836346990158
fadj:6.6245517662317841
ctrl_image:False
mag_phase:False
work_pt:7.014268759456596
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:35.101009812234715
y_orig_um:229.08000832870206