filename:TLM__MD_M026_S096_TARGET_EXPOSE_SCAN___COUNT_2600002.DAT
scan_file:SCAN_MD_M026_S096_2016-02-22T232219Z_TGT06
sw_ver:665
start_time:"2016-02-22 23:22:19.347062"
end_time:"2016-02-23 17:21:24.367760"
duration:"17:59:05.020698"
channel:ZS
tip_num:7
lin_pos:1.4068818188754102
tip_offset:63.543183031967715
wheel_pos:96
target:6
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:5
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.5111009384298466
set_pt:6.0086976424811169
fadj:6.3840695811398493
ctrl_image:False
mag_phase:True
work_pt:6.759933538560018
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:23.513118391967708
y_orig_um:40.000003200000002