filename:TLM__MD_M026_S097_TARGET_EXPOSE_SCAN___COUNT_2600003.DAT
scan_file:SCAN_MD_M026_S097_2016-02-25T200701Z_TGT10
sw_ver:665
start_time:"2016-02-25 20:07:01.426180"
end_time:"2016-02-26 07:14:12.438978"
duration:"11:07:11.012798"
channel:ZS
tip_num:9
lin_pos:-0.39551384756237123
tip_offset:79.600766765850338
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:38596
y_orig:416
xsteps:96
x_step:123
x_step_nm:469.10231999999996
xlen_um:45.033822719999996
ysteps:192
y_step:337
y_step_nm:468.05559299999999
ylen_um:89.866673855999991
z_step:4
z_ret:10011
z_ret_nm:1641.8040000000001
x_dir:L_H
y_dir:H_L
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:4.0985732814526585
set_pt:1.2295719844357977
fadj:1.68032349126421
ctrl_image:False
mag_phase:False
work_pt:1.844373611708558
set_pt_per:29.999237048905165
work_pt_per:-45.00038147554742
xy_settle:50
z_settle:50
x_orig_um:57.083855405850343
y_orig_um:-139.14666780070206