aborted:False
ac_gain:6
channel:ZS
ctrl_image:True
dummy:False
duration:"2:26:51.002817"
end_time:"2016-02-29 06:38:49.521164"
exc_lvl:4
fadj:0.0
fast_dir:Y
filename:TLM__MD_M026_S097_TARGET_EXPOSE_SCAN___COUNT_2600003.DAT
lin_pos:-0.3942931258106355
mag_phase:False
res_amp:0.8755626764324407
scan_file:SCAN_MD_M026_S097_2016-02-29T041158Z_TGT10
scan_type:CON
set_pt:0.8508430609597925
set_pt_per:50.000762951094835
start_time:"2016-02-29 04:11:58.518347"
stp:97.0
sw_ver:665
target:10
target_type:SOLGEL
tip_num:9
tip_offset:81.73702983138783
wheel_pos:161
work_pt:0.7879997286741708
work_pt_per:-89.99923704890517
x_closed:False
x_dir:L_H
x_orig:44500
x_orig_um:81.73702983138783
x_step:82
x_step_nm:312.73488
xlen_um:40.03006464
xsteps:128
xy_settle:50
y_closed:True
y_dir:L_H
y_orig:368
y_orig_um:229.08000832870206
y_step:225
y_step_nm:312.500025
ylen_um:40.0000032
ysteps:128
z_ret:3814
z_ret_nm:625.496
z_settle:50
z_step:12.0