filename:TLM__MD_M026_S098_TARGET_EXPOSE_SCAN___COUNT_2600004.DAT
scan_file:SCAN_MD_M026_S098_2016-03-02T083101Z_TGT10
sw_ver:665
start_time:"2016-03-02 08:31:01.578559"
end_time:"2016-03-02 17:31:59.593086"
duration:"9:00:58.014527"
channel:ZS
tip_num:9
lin_pos:-0.39520866712443731
tip_offset:80.134832532234711
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:4
z_ret:15732
z_ret_nm:2580.0480000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.2948043030441756
set_pt:6.6358434424353403
fadj:7.0505836575875485
ctrl_image:False
mag_phase:False
work_pt:7.465260587439515
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:35.101009812234715
y_orig_um:229.08000832870206