filename:TLM__MD_M026_S098_TARGET_EXPOSE_SCAN___COUNT_2600004.DAT
scan_file:SCAN_MD_M026_S098_2016-03-02T204151Z_TGT10
sw_ver:665
start_time:"2016-03-02 20:41:51.596751"
end_time:"2016-03-03 05:47:44.607289"
duration:"9:05:53.010538"
channel:ZS
tip_num:9
lin_pos:-0.39520866712443731
tip_offset:80.134832532234711
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:54445
y_orig:51691
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:21
y_step_nm:29.166669000000002
ylen_um:7.4666672640000007
z_step:4
z_ret:1524
z_ret_nm:249.93600000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.8141451132982374
set_pt:6.2513160906385901
fadj:6.6419470511940188
ctrl_image:False
mag_phase:False
work_pt:7.03267098386272
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:118.06347133223471
y_orig_um:157.79805818170206