filename:TLM__MD_M026_S098_TARGET_EXPOSE_SCAN___COUNT_2600004.DAT
scan_file:SCAN_MD_M026_S098_2016-03-05T085848Z_TGT06
sw_ver:665
start_time:"2016-03-05 08:58:48.666570"
end_time:"2016-03-05 18:32:52.677652"
duration:"9:34:04.011082"
channel:ZS
tip_num:7
lin_pos:1.4068818188754102
tip_offset:63.543183031967715
wheel_pos:96
target:6
target_type:SILICON
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:5
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.6076142519264511
set_pt:6.8860914015411616
fadj:7.3163958190280001
ctrl_image:False
mag_phase:False
work_pt:7.746787154846633
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:43.528150711967726
y_orig_um:19.911112704000001