filename:TLM__MD_M026_S098_TARGET_EXPOSE_SCAN___COUNT_2600004.DAT
scan_file:SCAN_MD_M026_S098_2016-03-06T064424Z_TGT06
sw_ver:665
start_time:"2016-03-06 06:44:24.691773"
end_time:"2016-03-06 13:59:50.700178"
duration:"7:15:26.008405"
channel:ZS
tip_num:1
lin_pos:6.6477454795147635
tip_offset:1.054589150835497
wheel_pos:96
target:6
target_type:SILICON
x_orig:44398
y_orig:27418
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:22
y_step_nm:30.555558000000001
ylen_um:7.822222848
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.794155794613566
set_pt:0.68543526359960327
fadj:8.3250171663996344
ctrl_image:False
mag_phase:False
work_pt:2.6445042616264147
set_pt_per:6.999313344014649
work_pt_per:-27.000839246204322
xy_settle:150
z_settle:150
x_orig_um:0.66557747083550112
y_orig_um:7.430556150000001