filename:TLM__MD_M026_S098_TARGET_EXPOSE_SCAN___COUNT_2600004.DAT
scan_file:SCAN_MD_M026_S098_2016-03-07T122937Z_TGT24
sw_ver:665
start_time:"2016-03-07 12:29:37.726233"
end_time:"2016-03-08 08:10:29.749028"
duration:"19:40:52.022795"
channel:ZS
tip_num:2
lin_pos:5.7746242465857938
tip_offset:-0.15756847486107972
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:42628
y_orig:27360
xsteps:416
x_step:9
x_step_nm:34.324559999999998
xlen_um:14.27901696
ysteps:416
y_step:26
y_step_nm:36.111114000000001
ylen_um:15.022223424
z_step:4
z_ret:440
z_ret_nm:72.159999999999997
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.1435111009384293
set_pt:0.63996337834744788
fadj:1.7373922331578546
ctrl_image:False
mag_phase:False
work_pt:2.377298934140382
set_pt_per:6.999313344014649
work_pt_per:-25.99984740978104
xy_settle:150
z_settle:150
x_orig_um:-7.2970769548610832
y_orig_um:7.5111117120000008