filename:TLM__MD_M027_S099_TARGET_EXPOSE_SCAN___COUNT_2700001.DAT
scan_file:SCAN_MD_M027_S099_2016-03-09T082108Z_TGT13
sw_ver:665
start_time:"2016-03-09 08:21:08.777030"
end_time:"2016-03-10 07:03:48.803334"
duration:"22:42:40.026304"
channel:ZS
tip_num:11
lin_pos:-2.2403295948729687
tip_offset:-60.32679102769545
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:4729
z_ret_nm:775.55600000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.2213321126115808
set_pt:2.3053330281528952
fadj:3.7805752651255053
ctrl_image:False
mag_phase:False
work_pt:4.149634627802367
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-100.35685566769544
y_orig_um:40.000003200000002