filename:TLM__MD_M027_S099_TARGET_EXPOSE_SCAN___COUNT_2700001.DAT
scan_file:SCAN_MD_M027_S099_2016-03-10T150611Z_TGT13
sw_ver:665
start_time:"2016-03-10 15:06:11.812646"
end_time:"2016-03-11 13:46:22.838902"
duration:"22:40:11.026256"
channel:ZS
tip_num:11
lin_pos:-2.1661707484550239
tip_offset:69.451190203707924
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:4729
z_ret_nm:775.55600000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.6997787441824972
set_pt:2.1750209811551078
fadj:3.5669489585717558
ctrl_image:False
mag_phase:False
work_pt:3.9149336224107123
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:29.421125563707925
y_orig_um:40.000003200000002