filename:TLM__MD_M027_S099_TARGET_EXPOSE_SCAN___COUNT_2700001.DAT
scan_file:SCAN_MD_M027_S099_2016-03-12T094957Z_TGT10
sw_ver:665
start_time:"2016-03-12 09:49:57.862135"
end_time:"2016-03-13 15:10:17.896115"
duration:"1 day, 5:20:20.033980"
channel:ZS
tip_num:9
lin_pos:-0.50598916609445332
tip_offset:-113.73104066529331
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:44500
y_orig:368
xsteps:320
x_step:33
x_step_nm:125.85672
xlen_um:40.274150399999996
ysteps:320
y_step:90
y_step_nm:125.00001
ylen_um:40.000003200000002
z_step:4
z_ret:4221
z_ret_nm:692.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.3820859082932788
set_pt:6.7054245822842757
fadj:7.1247425040054928
ctrl_image:False
mag_phase:False
work_pt:7.543813366247744
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-113.73104066529331
y_orig_um:-139.08000112870204