filename:TLM__MD_M027_S099_TARGET_EXPOSE_SCAN___COUNT_2700001.DAT
scan_file:SCAN_MD_M027_S099_2016-03-14T012412Z_TGT06
sw_ver:665
start_time:"2016-03-14 01:24:12.907966"
end_time:"2016-03-14 18:23:49.927648"
duration:"16:59:37.019682"
channel:ZS
tip_num:7
lin_pos:1.2979324025329977
tip_offset:-127.11829556725417
wheel_pos:96
target:6
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:3.4750896467536432
set_pt:2.779888609140154
fadj:2.9538414587624935
ctrl_image:False
mag_phase:False
work_pt:3.1275541688437727
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-167.14836020725414
y_orig_um:40.000003200000002