filename:TLM__MD_M027_S099_TARGET_EXPOSE_SCAN___COUNT_2700001.DAT
scan_file:SCAN_MD_M027_S099_2016-03-15T010948Z_TGT06
sw_ver:665
start_time:"2016-03-15 01:09:48.935485"
end_time:"2016-03-15 18:16:36.955305"
duration:"17:06:48.019820"
channel:ZS
tip_num:7
lin_pos:1.4438086518654154
tip_offset:128.16514076447683
wheel_pos:96
target:6
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:5
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.4125276569771881
set_pt:1.8530556191348135
fadj:3.0389868009460592
ctrl_image:False
mag_phase:False
work_pt:3.335665722620192
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:50
z_settle:50
x_orig_um:88.135076124476825
y_orig_um:40.000003200000002