filename:TLM__MD_M027_S100_TARGET_EXPOSE_SCAN___COUNT_2700002.DAT
scan_file:SCAN_MD_M027_S100_2016-03-19T083000Z_TGT13
sw_ver:665
start_time:"2016-03-19 08:30:00.055169"
end_time:"2016-03-20 13:25:10.088663"
duration:"1 day, 4:55:10.033494"
channel:ZS
tip_num:1
lin_pos:6.6471351186388956
tip_offset:-0.013542381933248748
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:288
x_step:73
x_step_nm:278.41032000000001
xlen_um:80.182172160000007
ysteps:288
y_step:200
y_step_nm:277.77780000000001
ylen_um:80.000006400000004
z_step:4
z_ret:4244
z_ret_nm:696.01600000000008
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:2.5000381475547417
fadj:4.0997940032043942
ctrl_image:False
mag_phase:False
work_pt:4.499969481374112
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-40.104628461933245
y_orig_um:40.000003200000002