filename:TLM__MD_M027_S100_TARGET_EXPOSE_SCAN___COUNT_2700002.DAT
scan_file:SCAN_MD_M027_S100_2016-03-20T223435Z_TGT13
sw_ver:665
start_time:"2016-03-20 22:34:35.099269"
end_time:"2016-03-21 05:30:01.107288"
duration:"6:55:26.008019"
channel:ZS
tip_num:1
lin_pos:6.5735866330968182
tip_offset:-128.72339208056866
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4
z_ret:26163
z_ret_nm:4290.732
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.9708552681773099
set_pt:2.4927138170443275
fadj:4.0878919661249711
ctrl_image:False
mag_phase:False
work_pt:4.486922907054506
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-168.75345672056864
y_orig_um:40.000003200000002