filename:TLM__MD_M027_S100_TARGET_EXPOSE_SCAN___COUNT_2700002.DAT
scan_file:SCAN_MD_M027_S100_2016-03-21T084522Z_TGT13
sw_ver:665
start_time:"2016-03-21 08:45:22.111059"
end_time:"2016-03-21 15:33:56.118946"
duration:"6:48:34.007887"
channel:ZS
tip_num:1
lin_pos:6.7206836041809721
tip_offset:128.6963073167006
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4
z_ret:26163
z_ret_nm:4290.732
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.9351491569390404
set_pt:2.4838635843442436
fadj:4.0732433051041426
ctrl_image:False
mag_phase:False
work_pt:4.4708550207872015
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:88.666242676700591
y_orig_um:40.000003200000002