filename:TLM__MD_M027_S101_TARGET_EXPOSE_SCAN___COUNT_2700003.DAT
scan_file:SCAN_MD_M027_S101_2016-03-24T041829Z_TGT13
sw_ver:665
start_time:"2016-03-24 04:18:29.189297"
end_time:"2016-03-24 11:03:12.197110"
duration:"6:44:43.007813"
channel:ZS
tip_num:1
lin_pos:6.6105134660868234
tip_offset:-64.101434348059541
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4
z_ret:26621
z_ret_nm:4365.8440000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:4.0997940032043942
ctrl_image:False
mag_phase:False
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:-104.13149898805953
y_orig_um:-144.08000152870204