filename:TLM__MD_M027_S102_TARGET_EXPOSE_SCAN___COUNT_2700004.DAT
scan_file:SCAN_MD_M027_S102_2016-04-02T221141Z_TGT06
sw_ver:665
start_time:"2016-04-02 22:11:41.460185"
end_time:"2016-04-03 19:44:07.485133"
duration:"21:32:26.024948"
channel:ZS
tip_num:7
lin_pos:1.3705653467612726
tip_offset:-0.010643167773039863
wheel_pos:96
target:6
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4
z_ret:4767
z_ret_nm:781.78800000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:5
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.2646677347982003
set_pt:7.4116121156633863
fadj:7.8748760204470889
ctrl_image:False
mag_phase:False
work_pt:8.338130276434464
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-40.040707807773039
y_orig_um:40.000003200000002