filename:TLM__MD_M027_S102_TARGET_EXPOSE_SCAN___COUNT_2700004.DAT
scan_file:SCAN_MD_M027_S102_2016-04-04T020500Z_TGT03
sw_ver:665
start_time:"2016-04-04 02:05:00.492485"
end_time:"2016-04-04 11:08:06.507052"
duration:"9:03:06.014567"
channel:ZS
tip_num:1
lin_pos:6.6474402990768295
tip_offset:0.52052338445112412
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:8.4998855573357748
ctrl_image:False
mag_phase:False
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:100
z_settle:100
x_orig_um:-1.4321626955488753
y_orig_um:1.9555557120000002