filename:TLM__MD_M027_S102_TARGET_EXPOSE_SCAN___COUNT_2700004.DAT
scan_file:SCAN_MD_M027_S102_2016-04-04T133304Z_TGT13
sw_ver:665
start_time:"2016-04-04 13:33:04.509859"
end_time:"2016-04-04 17:34:24.514530"
duration:"4:01:20.004671"
channel:ZS
tip_num:1
lin_pos:6.7573052567330434
tip_offset:192.78419928282534
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:39076
y_orig:43813
xsteps:512
x_step:22
x_step_nm:83.904479999999992
xlen_um:42.959093759999995
ysteps:384
y_step:60
y_step_nm:83.333340000000007
ylen_um:32.000002559999999
z_step:4
z_ret:1453
z_ret_nm:238.292
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:0.43915465018692301
set_pt:0.10986495765621423
fadj:0.1889066910811017
ctrl_image:False
mag_phase:False
work_pt:0.19762126785172118
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:172.09793112282534
y_orig_um:-15.340279005000001