filename:TLM__MD_M028_S103_TARGET_EXPOSE_SCAN___COUNT_2800001.DAT
scan_file:SCAN_MD_M028_S103_2016-04-09T082424Z_TGT10
sw_ver:665
start_time:"2016-04-09 08:24:24.643251"
end_time:"2016-04-09 17:02:13.653274"
duration:"8:37:49.010023"
channel:ZS
tip_num:9
lin_pos:-0.54596780346379792
tip_offset:-183.69365606164635
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:4
z_ret:20023
z_ret_nm:3283.7719999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.4217593652246894
set_pt:6.7371633478294042
fadj:7.1583123521782257
ctrl_image:False
mag_phase:False
work_pt:7.57951917479694
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-228.72747878164634
y_orig_um:45.000003600000007