filename:TLM__MD_M028_S103_TARGET_EXPOSE_SCAN___COUNT_2800001.DAT
scan_file:SCAN_MD_M028_S103_2016-04-09T233231Z_TGT10
sw_ver:665
start_time:"2016-04-09 23:32:31.660829"
end_time:"2016-04-10 09:12:08.672048"
duration:"9:39:37.011219"
channel:ZS
tip_num:9
lin_pos:-0.5923552300297551
tip_offset:-264.8716525520714
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:32692
y_orig:368
xsteps:96
x_step:246
x_step_nm:938.20463999999993
xlen_um:90.067645439999993
ysteps:96
y_step:675
y_step_nm:937.50007500000004
ylen_um:90.000007200000013
z_step:4
z_ret:20023
z_ret_nm:3283.7719999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:5.6659800106813156
set_pt:4.5328450446326389
fadj:4.8160524910353244
ctrl_image:False
mag_phase:False
work_pt:5.09933878095666
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-309.90547527207139
y_orig_um:45.000003600000007