filename:TLM__MD_M028_S103_TARGET_EXPOSE_SCAN___COUNT_2800001.DAT
scan_file:SCAN_MD_M028_S103_2016-04-10T171926Z_TGT12
sw_ver:665
start_time:"2016-04-10 17:19:26.681481"
end_time:"2016-04-11 07:26:55.697885"
duration:"14:07:29.016404"
channel:ZS
tip_num:1
lin_pos:6.6407263294422831
tip_offset:-11.228923476005072
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:34020
y_orig:3968
xsteps:160
x_step:131
x_step_nm:499.61304000000001
xlen_um:79.938086400000003
ysteps:160
y_step:360
y_step_nm:500.00004000000001
ylen_um:80.000006400000004
z_step:4
z_ret:7622
z_ret_nm:1250.008
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:False
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:-51.197966676005066
y_orig_um:40.000003200000002