filename:TLM__MD_M028_S103_TARGET_EXPOSE_SCAN___COUNT_2800001.DAT
scan_file:SCAN_MD_M028_S103_2016-04-11T181815Z_TGT21
sw_ver:665
start_time:"2016-04-11 18:18:15.710493"
end_time:"2016-04-12 13:47:32.733126"
duration:"19:29:17.022633"
channel:ZS
tip_num:1
lin_pos:6.5680933852140075
tip_offset:-138.33657587548737
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4
z_ret:5028
z_ret_nm:824.59199999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:False
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:-178.48868339548736
y_orig_um:39.977780976000005