filename:TLM__MD_M028_S104_TARGET_EXPOSE_SCAN___COUNT_2800002.DAT
scan_file:SCAN_MD_M028_S104_2016-04-13T092303Z_TGT03
sw_ver:665
start_time:"2016-04-13 09:23:03.755880"
end_time:"2016-04-13 16:51:58.764569"
duration:"7:28:55.008689"
channel:ZS
tip_num:1
lin_pos:6.6471351186388956
tip_offset:-0.013542381933248748
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9843595025558862
set_pt:0.48889906157015334
fadj:1.3968108644235904
ctrl_image:False
mag_phase:False
work_pt:1.676310225310163
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:-1.9662284619332482
y_orig_um:1.9555557120000002