filename:TLM__MD_M028_S104_TARGET_EXPOSE_SCAN___COUNT_2800002.DAT scan_file:SCAN_MD_M028_S104_2016-04-14T193146Z_TGT13 sw_ver:665 start_time:"2016-04-14 19:31:46.795536" end_time:"2016-04-16 13:46:55.844608" duration:"1 day, 18:15:09.049072" channel:ZS tip_num:1 lin_pos:6.7573052567330434 tip_offset:192.78419928282534 wheel_pos:208 target:13 target_type:SOLGEL x_orig:39076 y_orig:43813 xsteps:480 x_step:25 x_step_nm:95.346000000000004 xlen_um:45.766080000000002 ysteps:352 y_step:65 y_step_nm:90.277785000000009 ylen_um:31.777780320000002 z_step:4 z_ret:2907 z_ret_nm:476.74800000000005 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:MAG exc_lvl:2 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:2.1246662088960098 set_pt:0.14862287327382315 fadj:0.42481116960402837 ctrl_image:False mag_phase:True work_pt:0.5099393423319651 set_pt_per:6.999313344014649 work_pt_per:-24.000915541313802 xy_settle:100 z_settle:100 x_orig_um:172.09793112282534 y_orig_um:-15.340279005000001