filename:TLM__MD_M028_S104_TARGET_EXPOSE_SCAN___COUNT_2800002.DAT
scan_file:SCAN_MD_M028_S104_2016-04-18T171412Z_TGT13
sw_ver:665
start_time:"2016-04-18 17:14:12.904367"
end_time:"2016-04-19 10:30:19.924422"
duration:"17:16:07.020055"
channel:ZS
tip_num:2
lin_pos:5.7773708705271991
tip_offset:4.6490234225982761
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:41508
y_orig:9019
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4
z_ret:2859
z_ret_nm:468.87600000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.3360799572747393
set_pt:7.4686808575570307
fadj:7.9356069275959413
ctrl_image:False
mag_phase:False
work_pt:8.402400731823018
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:150
z_settle:150
x_orig_um:-6.7619858574017258
y_orig_um:32.984724861000004