filename:TLM__MD_M028_S105_TARGET_EXPOSE_SCAN___COUNT_2800003.DAT
scan_file:SCAN_MD_M028_S105_2016-04-21T022805Z_TGT13
sw_ver:666
start_time:"2016-04-21 02:28:05.970835"
end_time:"2016-04-21 18:50:16.989846"
duration:"16:22:11.019011"
channel:ZS
tip_num:1
lin_pos:6.720988784618906
tip_offset:129.23037308308497
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:34004
y_orig:26468
xsteps:192
x_step:41
x_step_nm:156.36743999999999
xlen_um:30.022548479999998
ysteps:320
y_step:110
y_step_nm:152.77779000000001
ylen_um:48.888892800000001
z_step:4
z_ret:2860
z_ret_nm:469.04000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.3705653467612731
set_pt:0.65583276112001221
fadj:1.8741130693522545
ctrl_image:False
mag_phase:False
work_pt:2.249021474619792
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:89.200308443084964
y_orig_um:-175.33000402870204