filename:TLM__MD_M028_S105_TARGET_EXPOSE_SCAN___COUNT_2800003.DAT
scan_file:SCAN_MD_M028_S105_2016-04-22T185949Z_TGT13
sw_ver:666
start_time:"2016-04-22 18:59:49.017904"
end_time:"2016-04-23 23:07:30.050572"
duration:"1 day, 4:07:41.032668"
channel:ZS
tip_num:1
lin_pos:6.5738918135347522
tip_offset:-128.18932631418429
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:33940
y_orig:3968
xsteps:320
x_step:66
x_step_nm:251.71343999999999
xlen_um:80.548300799999993
ysteps:320
y_step:180
y_step_nm:250.00002000000001
ylen_um:80.000006400000004
z_step:6
z_ret:5372
z_ret_nm:881.00800000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:5.7755397878995955
set_pt:0.40436408026245518
fadj:1.155107957579919
ctrl_image:False
mag_phase:True
work_pt:1.3861824265487561
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:100
z_settle:100
x_orig_um:-168.46347671418428
y_orig_um:-144.08000152870204