filename:TLM__MD_M028_S105_TARGET_EXPOSE_SCAN___COUNT_2800003.DAT
scan_file:SCAN_MD_M028_S105_2016-04-24T074402Z_TGT13
sw_ver:666
start_time:"2016-04-24 07:44:02.060570"
end_time:"2016-04-24 07:48:14.060652"
duration:"0:04:12.000082"
channel:ZS
tip_num:1
lin_pos:6.7206836041809721
tip_offset:128.6963073167006
wheel_pos:207
target:13
target_type:SOLGEL
x_orig:34004
y_orig:0
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4
z_ret:2860
z_ret_nm:469.04000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:0.34912642099641411
set_pt:0.024414435034714275
fadj:0.069886320286869613
ctrl_image:False
mag_phase:True
work_pt:0.083793537435761
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:88.666242676700591
y_orig_um:-138.56888997670205