filename:TLM__MD_M028_S105_TARGET_EXPOSE_SCAN___COUNT_2800003.DAT
scan_file:SCAN_MD_M028_S105_2016-04-26T005555Z_TGT13
sw_ver:666
start_time:"2016-04-26 00:55:55.112637"
end_time:"2016-04-26 05:03:09.117480"
duration:"4:07:14.004843"
channel:ZS
tip_num:1
lin_pos:6.5735866330968182
tip_offset:-128.72339208056866
wheel_pos:209
target:13
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:6
z_ret:22883
z_ret_nm:3752.8120000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:True
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:150
z_settle:150
x_orig_um:-168.75345672056864
y_orig_um:224.08000792870206