filename:TLM__MD_M028_S106_TARGET_EXPOSE_SCAN___COUNT_2800004.DAT
scan_file:SCAN_MD_M028_S106_2016-05-01T215616Z_TGT13
sw_ver:666
start_time:"2016-05-01 21:56:16.278362"
end_time:"2016-05-02 04:37:59.286231"
duration:"6:41:43.007869"
channel:ZS
tip_num:1
lin_pos:6.6471351186388956
tip_offset:-0.013542381933248748
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:42554
y_orig:32487
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:22
y_step_nm:30.555558000000001
ylen_um:7.822222848
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.9104295414663923
set_pt:0.69367513542381931
fadj:1.9821469443808652
ctrl_image:False
mag_phase:False
work_pt:2.3785938240287616
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:125
z_settle:125
x_orig_um:-7.4352750219332506
y_orig_um:0.39027780900000003