filename:TLM__MD_M028_S106_TARGET_EXPOSE_SCAN___COUNT_2800004.DAT scan_file:SCAN_MD_M028_S106_2016-05-02T052123Z_TGT13 sw_ver:666 start_time:"2016-05-02 05:21:23.287081" end_time:"2016-05-02 11:52:38.294745" duration:"6:31:15.007664" channel:ZS tip_num:1 lin_pos:6.6471351186388956 tip_offset:-0.013542381933248748 wheel_pos:208 target:13 target_type:SOLGEL x_orig:44398 y_orig:32487 xsteps:256 x_step:8 x_step_nm:30.510719999999999 xlen_um:7.8107443199999995 ysteps:256 y_step:22 y_step_nm:30.555558000000001 ylen_um:7.822222848 z_step:4 z_ret:373 z_ret_nm:61.172000000000004 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:2 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:9.9516289005874725 set_pt:0.69642175936522466 fadj:1.9903868162050813 ctrl_image:False mag_phase:False work_pt:2.3884820474149744 set_pt_per:6.999313344014649 work_pt_per:-24.000915541313802 xy_settle:125 z_settle:125 x_orig_um:-0.40255406193324461 y_orig_um:0.39027780900000003