filename:TLM__MD_M029_S107_TARGET_EXPOSE_SCAN___COUNT_2900001.DAT
scan_file:SCAN_MD_M029_S107_2016-05-08T072912Z_TGT13
sw_ver:666
start_time:"2016-05-08 07:29:12.458829"
end_time:"2016-05-08 07:33:23.458911"
duration:"0:04:11.000082"
channel:ZS
tip_num:1
lin_pos:6.6471351186388956
tip_offset:-0.013542381933248748
wheel_pos:210
target:13
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:6
z_ret:15658
z_ret_nm:2567.9120000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:0.41687647821774626
set_pt:0.02929732204165713
fadj:0.083314259555962458
ctrl_image:False
mag_phase:False
work_pt:0.1000541714486447
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:125
z_settle:125
x_orig_um:-40.104628461933245
y_orig_um:408.17387458698823