filename:TLM__MD_M029_S107_TARGET_EXPOSE_SCAN___COUNT_2900001.DAT scan_file:SCAN_MD_M029_S107_2016-05-09T221633Z_TGT13 sw_ver:666 start_time:"2016-05-09 22:16:33.504418" end_time:"2016-05-10 04:37:38.511883" duration:"6:21:05.007465" channel:ZS tip_num:1 lin_pos:6.5372701609826809 tip_offset:-192.277218280309 wheel_pos:209 target:13 target_type:SOLGEL x_orig:33988 y_orig:3968 xsteps:96 x_step:219 x_step_nm:835.23095999999998 xlen_um:80.182172160000007 ysteps:96 y_step:600 y_step_nm:833.33339999999998 ylen_um:80.000006400000004 z_step:6 z_ret:15279 z_ret_nm:2505.7560000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:2 ac_gain:3 x_closed:False y_closed:True aborted:False dummy:False res_amp:9.9842832074464027 set_pt:0.69886320286869608 fadj:1.9967956054016938 ctrl_image:False mag_phase:False work_pt:2.3963193800247877 set_pt_per:6.999313344014649 work_pt_per:-24.000915541313802 xy_settle:130 z_settle:130 x_orig_um:-232.36830436030903 y_orig_um:224.08000792870206