filename:TLM__MD_M029_S107_TARGET_EXPOSE_SCAN___COUNT_2900001.DAT
scan_file:SCAN_MD_M029_S107_2016-05-10T074842Z_TGT13
sw_ver:666
start_time:"2016-05-10 07:48:42.515626"
end_time:"2016-05-10 14:15:19.523199"
duration:"6:26:37.007573"
channel:ZS
tip_num:1
lin_pos:6.7570000762951095
tip_offset:192.250133516441
wheel_pos:209
target:13
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:6
z_ret:15279
z_ret_nm:2505.7560000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.9809262226291295
set_pt:0.69855802243076215
fadj:1.9961852445258259
ctrl_image:False
mag_phase:False
work_pt:2.3955136729340594
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:130
z_settle:130
x_orig_um:152.159047436441
y_orig_um:224.08000792870206