filename:TLM__MD_M029_S108_TARGET_EXPOSE_SCAN___COUNT_2900002.DAT
scan_file:SCAN_MD_M029_S108_2016-05-11T120928Z_TGT03
sw_ver:666
start_time:"2016-05-11 12:09:28.548941"
end_time:"2016-05-12 10:32:25.575248"
duration:"22:22:57.026307"
channel:ZS
tip_num:15
lin_pos:-5.7032120241092548
tip_offset:0.12895780880432284
wheel_pos:48
target:3
target_type:CAL
x_orig:50132
y_orig:42624
xsteps:512
x_step:2
x_step_nm:7.6276799999999998
xlen_um:3.9053721599999998
ysteps:512
y_step:6
y_step_nm:8.3333340000000007
ylen_um:4.2666670080000006
z_step:4
z_ret:152
z_ret_nm:24.928000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0646219577325091
set_pt:0.49439230945296408
fadj:1.4129854276340887
ctrl_image:False
mag_phase:True
work_pt:1.6955739493884892
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:125
z_settle:125
x_orig_um:21.608504688804317
y_orig_um:-13.688889984000001