filename:TLM__MD_M029_S108_TARGET_EXPOSE_SCAN___COUNT_2900002.DAT
scan_file:SCAN_MD_M029_S108_2016-05-13T154557Z_TGT12
sw_ver:666
start_time:"2016-05-13 15:45:57.609596"
end_time:"2016-05-14 14:42:41.636565"
duration:"22:56:44.026969"
channel:ZS
tip_num:1
lin_pos:6.6404211490043492
tip_offset:-11.762989242389445
wheel_pos:193
target:12
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:288
x_step:73
x_step_nm:278.41032000000001
xlen_um:80.182172160000007
ysteps:288
y_step:200
y_step_nm:277.77780000000001
ylen_um:80.000006400000004
z_step:8
z_ret:5093
z_ret_nm:835.25200000000007
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:MAG
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:0.69977874418249786
fadj:1.999847409781033
ctrl_image:False
mag_phase:True
work_pt:2.400054931081802
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:140
z_settle:140
x_orig_um:-51.854075322389441
y_orig_um:224.08000792870206