filename:TLM__MD_M029_S108_TARGET_EXPOSE_SCAN___COUNT_2900002.DAT
scan_file:SCAN_MD_M029_S108_2016-05-14T164931Z_TGT03
sw_ver:666
start_time:"2016-05-14 16:49:31.639049"
end_time:"2016-05-14 23:05:03.646405"
duration:"6:15:32.007356"
channel:ZS
tip_num:2
lin_pos:5.7749294270237277
tip_offset:0.37649729152329314
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:9.2314030670634004
set_pt:0.64606698710612653
fadj:1.8463416495002671
ctrl_image:False
mag_phase:True
work_pt:2.2156212534041386
set_pt_per:6.999313344014649
work_pt_per:-24.000915541313802
xy_settle:100
z_settle:100
x_orig_um:-1.5761887884767134
y_orig_um:1.9555557120000002