filename:TLM__MD_M029_S108_TARGET_EXPOSE_SCAN___COUNT_2900002.DAT
scan_file:SCAN_MD_M029_S108_2016-05-17T122911Z_TGT10
sw_ver:666
start_time:"2016-05-17 12:29:11.718572"
end_time:"2016-05-17 20:15:17.722708"
duration:"7:46:06.004136"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:163
target:10
target_type:SOLGEL
x_orig:33988
y_orig:3968
xsteps:96
x_step:219
x_step_nm:835.23095999999998
xlen_um:80.182172160000007
ysteps:96
y_step:600
y_step_nm:833.33339999999998
ylen_um:80.000006400000004
z_step:6
z_ret:20371
z_ret_nm:3340.8440000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.8941023880369272
set_pt:6.3150988021667809
fadj:6.7096971084153507
ctrl_image:False
mag_phase:True
work_pt:7.104631921092638
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-40.600184271805873
y_orig_um:592.29546928018283