filename:TLM__MD_M029_S108_TARGET_EXPOSE_SCAN___COUNT_2900002.DAT
scan_file:SCAN_MD_M029_S108_2016-05-17T232414Z_TGT14
sw_ver:666
start_time:"2016-05-17 23:24:14.726367"
end_time:"2016-05-18 09:46:19.738415"
duration:"10:22:05.012048"
channel:ZS
tip_num:1
lin_pos:6.6465247577630278
tip_offset:-1.0816739147019874
wheel_pos:224
target:14
target_type:SOLGEL
x_orig:36680
y_orig:43752
xsteps:256
x_step:23
x_step_nm:87.718319999999991
xlen_um:22.455889919999997
ysteps:256
y_step:23
y_step_nm:87.718319999999991
ylen_um:22.455889919999997
z_step:4
z_ret:1605
z_ret_nm:263.22000000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:7.9996948195620661
fadj:8.4998855573357748
ctrl_image:False
mag_phase:True
work_pt:8.999786374857635
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-30.90590271470198
y_orig_um:2.85275232